3

Comprehensive Simulations for Ultraviolet Lithography Process of Thick SU-8 Photoresist

Year:
2018
Language:
english
File:
PDF, 3.67 MB
english, 2018
9

A system-level model for a silicon thermal flow sensor

Year:
2009
Language:
english
File:
PDF, 496 KB
english, 2009
20

[Micro/Nano Technologies] Micro Electro Mechanical Systems Volume 2 || Micro Thermal Flow Sensor

Year:
2017
Language:
english
File:
PDF, 1.76 MB
english, 2017
24

A novel bonding technology for GaAs sensors

Year:
1990
Language:
english
File:
PDF, 362 KB
english, 1990
29

A silicon directly bonded capacitive absolute pressure sensor

Year:
2007
Language:
english
File:
PDF, 1.04 MB
english, 2007
30

Pull-in characterization of doubly-clamped composite beams

Year:
2009
Language:
english
File:
PDF, 1.57 MB
english, 2009
34

A nodal analysis model for the out-of-plane beamshape electrothermal microactuator

Year:
2009
Language:
english
File:
PDF, 413 KB
english, 2009
37

A FCOB packaged thermal wind sensor with compensation

Year:
2010
Language:
english
File:
PDF, 851 KB
english, 2010
39

GaAs piezoelectric modulated resistors

Year:
1993
Language:
english
File:
PDF, 628 KB
english, 1993